Adixen ADP 122 High reliability to process

• Wide interstage channels are able to accommodate large quantities of powder and particles.
• High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet makes ADP 122 one of the best on market
• Vertical pumping on each stage which prevents particulate accumulation in the swept volume.

Semiconductor fab rules compliant
• Compact: the series 2 model is only 390 mm wide.
• Clean: Alcatel technology is a frictionless and oil-free pump mechanism. There is no risk of particulate contamination.
• Quiet: All models include an integrated silencer, eliminating the need for an additional external silencer.
• Semi S2 compliant.

ADP 122 L has a Low cost of ownership
• Low power consumption at working pressures and at Ultimate Pressure.
• With moderate heat generation, series 2 water consumption is extremely low.
• Nitrogen Purge level is easily set by the customer. Pumps for clean applications do not require any purge.
Typical applications:

• ADP 122 LM, ADS 602 LM:
        Load Lock, Transfer Chambers, PVD, Sputtering
• ADP 122 P, ADS 602 P, ADS 1202 P, ADS 1802 P:
        Ashing, Stripping, Dielectric - Poly Etch, Implant Source, Medium CVD
• ADS 602 H, ADS 1202 H, ADS 1802 H:
        PECVD, LPCVD
A&J Vacuum also repair / rebuild and service Alcatel ADP 122, Adixen ADP-122 Pumps along with all other Alcatel Adixen Dry Pumps and Alcatel Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854